提問者:
LeonHLChen
等級:
鐘點工讀生
積分:
112
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Typical laser beam is gaussian mode, it means under different recipe and materials, you won't get the same spot size. Therefore, it's pretty important to fix your recipe(Speed, Freq, Power..etc) before finding focus location. It's better to use a material with better resolution performance for your laser. Then estimate your spot size, say, 30um, then you can go the following routine to find the focus. 1) Find a starting focus location which laser will etch the material. Then set 11 steps for focus height variation. For example, if the starting location is at 15mm height, then set each step for 0.5mm apart, then you can go from height 12.5~17.5mm for 11 steps. On each step, you can scribe several certain length lines, which apart a certain distance, say, 100um. After scribing, you can inspect each step's scribing line pairs. If the laser is out of focus, you can see the scribing lines are wide and maybe overlapped. If you can find one of step in between which looks best, reset the starting focus location. 2. Repeat procedure 1, however, decrease the distance between step, say 0.1mm, and line pairs distance, say 0.05mm. Again find the best line pairs and reset the step height as best focus location. 3. Agian repeat procedure 1/2 until to reach line pairs distance as 30um you expected. 4. All the numbers above jsu recommendated, you should figure the numbers on your laser system by yourself. For scribing pourpose, the final tuning should depend on the scribing depth. 5. Afetr found your focus location, reset your vision system to coincide your focus location. Remember, if your vision system has better Focus depth, then youu can use your vision system to set your focus location. Otherwise, you can't do that. Looks your new campany will go for Femtoseconad laser. Good luck, but I am never interested personally in that stuff for commercial applications. I just think Femto may find some good applications with better performance than mini/nano seconds laser processing. But I don't think it's far enough to have customer spedning more money to use Femto. You probably still have to fight with traditional lasers on the markets, sometime it will really frustrate you. That's just my opinion. Anyway, good luck!
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